4/19/2010	6:01:37 PM	Program started after a nonstandard shutdown
4/19/2010	6:01:37 PM	Helium valve closed
4/19/2010	6:01:37 PM	H2 valve closed
4/19/2010	6:01:37 PM	BCl3 valve closed
4/19/2010	6:01:37 PM	PH3 valve closed
4/19/2010	6:01:37 PM	SiCl4 pre valve closed
4/19/2010	6:01:37 PM	SiCl4 post valve closed
4/19/2010	6:01:37 PM	Main Vac valve closed
4/19/2010	6:01:37 PM	Bypass valve closed
4/19/2010	6:01:37 PM	Bubbler valve closed
4/19/2010	6:01:37 PM	Helium MFC set to  0.000000
4/19/2010	6:01:37 PM	H2 MFC set to  0.000000
4/19/2010	6:01:37 PM	BCl3 MFC set to  0.000000
4/19/2010	6:01:37 PM	SiCl4 MFC set to  0.000000
4/19/2010	6:01:37 PM	Bypass solenoid MFC set to  760.000000
4/19/2010	6:01:37 PM	Tube furnace set to 0
4/19/2010	6:01:58 PM	Bypass valve opened
4/19/2010	6:01:59 PM	Bypass valve closed
4/19/2010	6:01:59 PM	Bypass valve opened
4/19/2010	6:02:00 PM	Bypass valve closed
4/19/2010	6:02:09 PM	Main Vac valve opened
4/19/2010	6:02:10 PM	Main Vac valve closed
4/19/2010	6:03:49 PM	Bypass valve opened
4/19/2010	6:03:50 PM	Bypass valve closed
4/19/2010	6:03:51 PM	Bypass valve opened
4/19/2010	6:03:52 PM	Bypass valve closed
4/19/2010	6:03:54 PM	Bypass valve opened
4/19/2010	6:03:55 PM	Bypass valve closed
4/19/2010	6:11:18 PM	Main Vac valve opened
4/19/2010	6:13:11 PM	Main Vac valve closed
4/19/2010	6:13:17 PM	Main Vac valve opened
4/19/2010	6:13:46 PM	Main Vac valve closed
4/19/2010	6:13:49 PM	Main Vac valve opened
4/19/2010	6:14:38 PM	Main Vac valve closed
4/19/2010	6:14:45 PM	Main Vac valve opened
4/19/2010	6:15:53 PM	Main Vac valve closed
4/19/2010	6:16:07 PM	Main Vac valve opened
4/19/2010	6:16:20 PM	Main Vac valve closed
4/19/2010	6:17:36 PM	Main Vac valve opened
4/19/2010	6:19:22 PM	Main Vac valve closed
4/19/2010	6:22:25 PM	Main Vac valve opened
4/19/2010	6:23:32 PM	Main Vac valve closed
4/19/2010	6:23:39 PM	Main Vac valve opened
4/19/2010	6:23:41 PM	Main Vac valve closed
4/19/2010	6:24:29 PM	Main Vac valve opened
4/19/2010	6:25:56 PM	Main Vac valve closed
4/19/2010	6:26:05 PM	Main Vac valve opened
4/19/2010	6:27:18 PM	Main Vac valve closed
4/19/2010	6:28:05 PM	Main Vac valve opened
4/19/2010	6:29:02 PM	Main Vac valve closed
4/19/2010	6:29:39 PM	Main Vac valve opened
4/19/2010	6:29:47 PM	Main Vac valve closed
4/19/2010	6:31:57 PM	Main Vac valve opened
4/19/2010	6:34:12 PM	Main Vac valve closed
4/19/2010	6:36:08 PM	Main Vac valve opened
4/19/2010	6:37:53 PM	Main Vac valve closed
4/19/2010	6:37:59 PM	Main Vac valve opened
4/19/2010	6:38:13 PM	Main Vac valve closed
4/19/2010	6:52:06 PM	Main Vac valve opened
4/19/2010	6:52:35 PM	Bypass valve opened
4/19/2010	6:52:35 PM	Bypass valve closed
4/19/2010	6:54:00 PM	Main Vac valve closed
4/19/2010	6:54:11 PM	Main Vac valve opened
4/19/2010	6:54:34 PM	Main Vac valve closed
4/19/2010	6:54:39 PM	Main Vac valve opened
4/19/2010	6:55:17 PM	Main Vac valve closed
4/19/2010	6:55:21 PM	Main Vac valve opened
